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Application of Thin Piezoelectric Films in DiamondBased Acoustoelectronic Devices
| Автор | Boris P. Sorokin | |
| Автор | Gennady M. Kvashnin | |
| Автор | Andrey S. Novoselov | |
| Автор | Sergey I. Burkov | |
| Автор | Anton B. Shipilov | |
| Автор | Nikolay V. Luparev | |
| Автор | Victor V. Aksenenkov | |
| Автор | Vladimir D. Blank | |
| Дата внесения | 2019-07-01T07:27:55Z | |
| Дата, когда ресурс стал доступен | 2019-07-01T07:27:55Z | |
| Дата публикации | 2018-08 | |
| Библиографическое описание | Boris P. Sorokin. Application of Thin Piezoelectric Films in DiamondBased Acoustoelectronic Devices [Текст] / Boris P. Sorokin, Gennady M. Kvashnin, Andrey S. Novoselov, Sergey I. Burkov, Anton B. Shipilov, Nikolay V. Luparev, Victor V. Aksenenkov, Vladimir D. Blank // InTech: Organic and Inorganic Materials and Applications. — 2018. — С. 15-41 | |
| ISSN | 0192303X | |
| URI (для ссылок/цитирований) | https://www.intechopen.com/books/piezoelectricity-organic-and-inorganic-materials-and-applications/application-of-thin-piezoelectric-films-in-diamond-based-acoustoelectronic-devices | |
| URI (для ссылок/цитирований) | https://elib.sfu-kras.ru/handle/2311/111053 | |
| Описание | Текст статьи не публикуется в открытом доступе в соответствии с политикой журнала. | |
| Аннотация | The theory of external loading influence on acoustic parameters of piezoelectric fivelayered structure as “Al/(001) AlN/Mo/(001) diamond/Me” has been developed. Oscillations in diamond-based high-overtone bulk acoustic resonators (HBARs) have been investigated in terms of 3D FEM simulation. Peculiarities of technology of aluminum-scandium nitride (ASN) films have been discussed. Composition Al0.8Sc0.2N was obtained to create the diamond-based HBAR and SAWresonator. Application of ASN films has resulted in a drastic increasing an electromechanical coupling up to 2.5 times in comparison with aluminum nitride | |
| Тема | aluminum nitride | |
| Тема | aluminum-scandium nitride | |
| Тема | diamond-based HBAR | |
| Тема | diamond-based SAWresonator | |
| Тема | acoustoelectronic sensor | |
| Тема | UHF | |
| Название | Application of Thin Piezoelectric Films in DiamondBased Acoustoelectronic Devices | |
| Тип | Journal Article | |
| Тип | Published Journal Article | |
| Страницы | 15-41 | |
| ГРНТИ | 29.37.15 | |
| Дата обновления | 2019-07-01T07:27:55Z | |
| DOI | 10.5772/intechopen.76715 | |
| Институт | Институт инженерной физики и радиоэлектроники | |
| Подразделение | Базовая кафедра физики твердого тела и нанотехнологий | |
| Журнал | InTech | |
| Квартиль журнала в Scopus | Q4 |
