Indium–tin oxide films obtained by extraction pyrolysis
URI (for links/citations):
https://elib.sfu-kras.ru/handle/2311/33246Author:
Snezhko, N. Yu.
Belousov, A. L.
Ryzhenkov, A. V.
Patrusheva, T. N.
Mikhlin, Yu. L.
Zharkov, S. M.
Khol’Kin, A. I.
Corporate Contributor:
Институт инженерной физики и радиоэлектроники
Кафедра приборостроения и наноэлектроники
Date:
2015-11Journal Name:
Theoretical Foundations of Chemical EngineeringJournal Quartile in Scopus:
Q3Journal Quartile in Web of Science:
Q4Bibliographic Citation:
Snezhko, N. Yu. Indium–tin oxide films obtained by extraction pyrolysis [Текст] / N. Yu. Snezhko, A. L. Belousov, A. V. Ryzhenkov, T. N. Patrusheva, Yu. L. Mikhlin, S. M. Zharkov, A. I. Khol’Kin // Theoretical Foundations of Chemical Engineering. — 2015. — Т. 49 (№ 5). — С. 721-725Текст статьи не публикуется в открытом доступе в соответствии с политикой журнала.
Abstract:
Thin indium–tin oxide (ITO) films were obtained by pyrolysis of solutions of indium and tin
extracts on glass substrates. The extraction pyrolysis (EP) technology uses inexpensive starting compounds
and provides the required stoichiometric ratio of elements due to complete mixing of precursors in the
organic solution. The thermal decomposition of the extracts occurs in a narrow temperature range of 350–
400°C. X Ray photoelectron spectroscopy (XPS) studies showed that the ITO films obtained by extraction
pyrolysis have no impurities including carbon. The films have a nanocrystalline structure with a grain size of
~6 nm according to XRD, AFM, and TEM studies. The optical transmission spectra showed that the films
were highly transparent in the visible region of the spectrum and absorbed IR radiation at long and medium
wavelengths.
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