Metal Layer Thickness Influence on the Dispersion Characteristics of Acoustic Waves in the Layered Structure "Me/ZnO/Me/diamond"

Abstract

The research paper presents an analysis of the in?uence of mass loading represented by two metal layers (the upper and lower electrodes) on variations in the phase velocity of the elastic wave dispersion modes in the piezoelectric layered structure "Me/ZnO/Me/diamond" depending on the frequency and the ratio of the metal layer thickness to the piezoelectric crystalline layer thickness. Aluminum (Al), molybdenum (Mo) and platinum (Pt) are considered as the metal layer materials. It is demonstrated that variation in the elastic wave phase velocity depends on the acoustic impedance of metal layer and its thickness.