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Maximova, O. A.
Kosyrev, N. N.
Varnakov, S. N.
Lyaschenko, S. A.
Yakovlev, I. A.
Tarasov, I. A.
Shevtsov, D. V.
Maximova, O. M.
Ovchinnikov, S. G.
2018-02-07T07:34:28Z
2018-02-07T07:34:28Z
2017-10
Maximova, O. A. In situ magneto-optical ellipsometry data analysis for films growth control [Текст] / O. A. Maximova, N. N. Kosyrev, S. N. Varnakov, S. A. Lyaschenko, I. A. Yakovlev, I. A. Tarasov, D. V. Shevtsov, O. M. Maximova, S. G. Ovchinnikov // Journal of Magnetism and Magnetic Materials. — 2017. — № 440. — С. 196-198
03048853
http://www.sciencedirect.com/science/article/pii/S0304885316331122
http://elib.sfu-kras.ru/handle/2311/70272
In this work we present the way of ferromagnetic films study by means of magneto-ellipsometry. The method of interpretation of in situ magneto-optical ellipsometry spectra for real time growth control is described. The method has been successfully tested on Si/SiO /F2 e films within the model of a homogeneous semi-infinite medium. As a result, the dielectric tensor components for Fe layer were calculated using a developed approach.
In situ magneto-optical ellipsometry data analysis for films growth control
Journal Article
Journal Article Preprint
196-198
29.19.16
2018-02-07T07:34:28Z
10.1016/j.jmmm.2016.12.050
Инженерно-строительный институт
Институт фундаментальной биологии и биотехнологии
Кафедра строительных конструкций и управляемых систем
Кафедра водных и наземных экосистем
Journal of Magnetism and Magnetic Materials
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Q2


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