Show simple item record

Belyaev, B. A.
Izotov, A. V.
Solovev, P. N.
2017-06-16T10:28:21Z
2017-06-16T10:28:21Z
2016-06
Belyaev, B. A. Growth simulation and structure analysis of obliquely deposited thin films [Текст] / B. A. Belyaev, A. V. Izotov, P. N. Solovev // Russian Physics Journal. — 2016. — Т. 59 (№ 2). — С. 301-307
10648887
http://elib.sfu-kras.ru/handle/2311/33100
Текст статьи не публикуется в открытом доступе в соответствии с политикой журнала.
Based on the Monte Carlo method, a model of growth of thin films prepared by oblique angle deposition of particles is constructed. The morphology of structures synthesized by simulation is analyzed. To study the character of distribution of microstructural elements (columns) in the film plane, the autocorrelation function of the microstructure and the fast Fourier transform are used. It is shown that with increasing angle of particle incidence, the film density monotonically decreases; in this case, anisotropy arises and monotonically increases in the cross sections of columns, and the anisotropy of distribution of columns in the substrate plane also increases.
http://link.springer.com/article/10.1007/s11182-016-0771-2
oblique angle deposition
simulation of film growth
Monte Carlo method
Growth simulation and structure analysis of obliquely deposited thin films
Journal Article
Published Journal Article
301-307
29.19.22
2017-06-16T10:28:21Z
10.1007/s11182-016-0771-2
Институт инженерной физики и радиоэлектроники
Научно-исследовательская часть
Кафедра радиотехники
Russian Physics Journal
Q3
Q4


Files in this item

Thumbnail

This item appears in the following Collection(s)

Show simple item record